Effect of interaction manipulation on nonconductive micro sphere under scanning electron microscope

Abstract

To research the influence of mechanical mechanism emerging in interaction manipulation aimed to quantitatively analyze and design force sensor on nonconductive micro object used to construct non-conductive device, mechanical theory modeling of micro glass sphere acting on the substrate was primarily established according to assumption conditions. On the basis of further analysis of interaction model, experimental procedures consisting of overall steps in transferring micro glass object using the manipulator ends, possessing two kinds of interactive manipulation of picking-up methods including interaction positions acting on the micro glass sphere and interaction angles formed by the central axial line of active end and substrate plane, were conducted to discuss the mechanical effect of interaction under the scanning electron microscope (SEM), respectively. Additionally, deviations of locations landed onto the substrate relative to the allowable presetting area were also considered. The experimental results demonstrated that the micro glass spheres were enabled to pickup with the interaction angle of about 30 degrees and interaction position located underneath the central plane of micro sphere, and realize the allowable manipulation of placement which may ask for strictly controlling time of transferring micro glass sphere within a shorter period of time.