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Determination of E, CTE of thin films from curvature measurement

2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2017-04-03 DOI:10.1109/EUROSIME.2017.7926213
S. Ananiev, M. Schneegans
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Abstract

Developed method can be useful for cases, where direct determination of E/CTE is not possible.
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用曲率法测定薄膜的E、CTE
该方法可用于无法直接测定E/CTE的病例。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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