Planar millimeter-wave and terahertz filters

Abstract

In the chapter, several types of planar millimeter-wave and terahertz filters and their design methods are described. The millimeter-wave SIW filter using high-order resonating mode is introduced at first, and then a fast and accurate design method, which uses the space mapping (SM) method with different types of coarse-models, for the complex SIW components and the W-band filter is described. As followed, terahertz filters using the silicon deep reactive ion-etching process are introduced in detail.