Nonequilibrium nondissipative thermodynamics - and its application to diamond film deposition

2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) Pub Date : 2001-10-22 DOI:10.1109/ICSICT.2001.982170

Jitao Wang

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引用次数: 2

Abstract

The equality of the 2/sup nd/ law of thermodynamics had been regarded as the sufficient and necessary condition for a system being in equilibrium for about 150 years. However, such a classical or traditional basic concept should be overthrown or changed for complex systems including nonspontaneous reaction(s). Therefore, a new field of nonequilibrium nondissipative thermodynamics has been introduced by the author into a complete systematization of modem thermodynamics. Nonequilibrium nondissipative thermodynamics provides a solid theoretical base for quantitative calculation of nonequilibrium phase diagrams. A series of calculated nonequilibrium phase diagrams for activated low pressure diamond films deposition agree excellently with a great number of experimental data reported in the literature. Nonequilibrium nondissipative thermodynamics and the nonequilibrium phase diagram theorem can also be used for cubic boron nitride deposition and other solid-state and integrated circuit technology.

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非平衡非耗散热力学及其在金刚石薄膜沉积中的应用

热力学2/sup和2/sup定律的等式被认为是一个系统处于平衡状态的充要条件，已有150年的历史。然而，对于包括非自发反应在内的复杂系统，这种经典或传统的基本概念应该被推翻或改变。因此，作者在现代热力学的完整系统中引入了一个新的非平衡非耗散热力学领域。非平衡非耗散热力学为非平衡相图的定量计算提供了坚实的理论基础。一系列计算得到的活化低压金刚石膜沉积的非平衡相图与文献报道的大量实验数据吻合得很好。非平衡非耗散热力学和非平衡相图定理也可用于立方氮化硼沉积和其他固态和集成电路技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)

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