Design, Fabrication, and Test of a Low-Cost MEMS-Based Sun Sensor

Jamal Addin Bahrampoor, A. Naghash
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引用次数: 1

Abstract

Based on outstanding characteristics of MEMS technology, modern space missions are looking for putting it into practice. Sun sensors are key components in the Attitude Determination and Control Subsystem (ADCS) of spacecraft and satellites. This system requires high precision sensors for controlling the orientation of the vehicle in the desired direction and this can be done by means of a great source of energy, the sun. Focusing on a simple and low-cost fabrication approach the detector has been designed for a field of view (FoV) of ±70°. The working principle of designed sensor is based on differences of currents generated in sensing layers. For having a p-n junction the silicon was doped by phosphorus in 850°C by POCL3 in a container that Ar passes through it on p-type silicon. Afterward, the ITO contacts are deposited by flow of Ar with rate of 200 sccm for about 40 min. By considering geometrical aspects, the detector was developed by placing three MEMS chips, based on a specified lay-out, close to each other. In the maximum FoV the output voltage of the sensor was shown to be 2V.
低成本mems太阳传感器的设计、制造与测试
基于MEMS技术的突出特点,现代航天任务正在寻求将其付诸实践。太阳敏感器是航天器和卫星姿态确定与控制子系统(ADCS)的关键部件。这个系统需要高精度的传感器来控制车辆的方向,这可以通过一个巨大的能源——太阳来实现。聚焦于一个简单和低成本的制造方法,探测器已被设计为视场(FoV)为±70°。所设计的传感器的工作原理是基于传感层产生的电流的差异。由于具有p-n结,硅在850°C时用POCL3在p型硅上掺杂磷,容器中有Ar通过。之后,ITO触点通过速度为200 sccm的Ar流沉积约40分钟。考虑到几何方面,探测器是通过放置三个MEMS芯片来开发的,基于指定的布局,彼此靠近。在最大FoV中,传感器的输出电压显示为2V。
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