Influence of nonlinear intermolecular forces on the harmonic behavior of NEM resonators

2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2013-04-14 DOI:10.1109/EUROSIME.2013.6529974

M. Zanaty, R. Jansen, V. Rochus, M. Abbas, A. Witvrouw, H. Tilmans, X. Rottenberg

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引用次数: 2

Abstract

This paper investigates the nonlinear effects introduced by the intermolecular forces on the static and harmonic behavior of electrostatically transduced nano-electromechanical (NEM) resonators using a lumped parameter model. We compute the pull-in parameters and study the full impact of the intermolecular forces on the spring softening effect, computing the non-linear terms using a Taylor expansion. We look at the impact on the resonance frequency and the maximum linear vibration amplitude of NEM resonators. From the set of case studies, we find that the non-linear intermolecular forces can have large effects on low stiffness structures. In particular, we report on a doubly clamped beam (DCB) resonator for which the intermolecular nonlinearity is expected to produce a 1% frequency shift and a 33% reduction in the maximum linear vibration amplitude.

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非线性分子间力对NEM谐振器谐波行为的影响

本文采用集总参数模型研究了分子间力对静电转导纳米机电(NEM)谐振器的静态和谐波行为的非线性影响。我们计算了拉入参数，并研究了分子间力对弹簧软化效应的全面影响，使用泰勒展开计算了非线性项。我们观察了对NEM谐振器的共振频率和最大线性振动幅度的影响。从一组实例研究中，我们发现非线性分子间力对低刚度结构有很大的影响。特别是，我们报告了双箝位光束(DCB)谐振器，分子间非线性预计会产生1%的频移和33%的最大线性振动幅度减少。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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