{"title":"In-plane coplanarity measurement by Talbot interferometer","authors":"Shilpi Agarwal, C. Shakher","doi":"10.1117/12.2644120","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":262440,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications IX","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Metrology and Inspection for Industrial Applications IX","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2644120","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}