Numerical Modeling and Experimental Validation on Non-Contact Bernoulli Picker for 3D Device Stacking Process

D. Min, M. Han, Juno Kim, Kangsan Lee, K. Lim, Euisun Choi, Seungdae Seok, Byeongjun Lee, M. Rhee
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Abstract

This paper focuses on numerical computation and experimental examination of Bernoulli picker, which is the essential module for the 3D stacking process for heterogeneous integration devices, to reveal the fundamental physics of non-contact die handling and to seek optimized design. We estimated the pick-up performance of the Bernoulli picker and the deformation of the die using pseudo-coupling of flow and structural analysis. We simulated the flow field around the target die and picker using the RANS equation with the k-w SST turbulence model to predict the levitation height between the picker surface and target die. Then we estimated the deformation of the die using the inertial relief approach of ABAQUS with computed pressure field information. Based on the numerical investigations, we made a prototype of a Bernoulli picker and conducted experimental measures to verify the feasibility of our design. The measured results indicate that the present numerical approach can be utilized for further optimization.
非接触式伯努利拾取器三维器件堆积过程的数值模拟与实验验证
本文对异构集成器件三维堆积过程中必不可少的模块伯努利拾取器进行了数值计算和实验检验,揭示了非接触模具搬运的基本物理规律,寻求优化设计。利用流场和结构分析的伪耦合对伯努利拾取器的拾取性能和模具的变形进行了估计。利用RANS方程和k-w海温湍流模型模拟了目标模具和拾取器周围的流场,预测了拾取器表面与目标模具之间的悬浮高度。然后利用ABAQUS的惯性缓解方法,结合计算得到的压力场信息估计模具的变形。在数值研究的基础上,我们制作了一个伯努利拾取器的原型,并进行了实验测量来验证我们设计的可行性。实测结果表明,该数值方法可用于进一步优化。
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