A Novel Wafer-Map Similarity Search System with High Speed and Accuracy

Abstract

Wafer-maps contain extensive and complex production information. Fast and accurate issue tracing requires comprehensive wafer-map analyzing. This paper proposed a fast wafer-map similarity search system which can identify the similar wafer-maps accurately. The similarity search system includes a pre-processing stage and a similarity score calculation stage. The pre-processing stage consists of morphological closing and a spatial filter. The similarity calculation stage will perform image processing and then determine the similarity score based on formula. The final similarity ranking is based on the similarity score the higher score the higher ranking.