MEMS Devices

Abstract

Jenoptik has the knowledge and tools to perform detailed design and analysis for a variety of microelectro-mechanical systems (MEMS) devices. An important MEMS technology that can be used in many industries is the scanning two-axis tilt mirror. There are several major benefits of JENOPTIK tilt mirrors. First, the electrostatically generated tilt angle is analog as opposed to “on-off”. Second, most competing products have holes in the mirror surface as a result of processing requirements, Jenoptik devices have no holes in the mirror surface, allowing for a better reflection of all incident light. Finally, low voltages are required for actuation, a total of less than 70 volts is required for the full 3 degrees of tilt with less voltage is required for less tilt deflection.