A MEMS Electrothermal Actuator Designed for a DC Switch Aimed at Power Switching Applications and High Voltage Resilience

Abstract

This work presents the design and fabrication of a chevron (V-shaped) type electro-thermally actuated micro-electromechanical systems (MEMS) actuator aimed for a DC switch structure using the PiezoMUMPs technology. The chevron actuator employs stacked composite SOI/SiO2/Al–Cr layers. The potential of crosstalk between the switch and DC heater actuator is mitigated. An oxide (SiO2) layer acts as an interface between the thin film aluminum (Al) heater and a silicon (Si) structural layer that forms the MEMS switch for power switching applications. Preliminary results show that the out-of-plane motion of the proposed design is reduced by more than 10× in comparison to a reference design. The average power consumption during actuation was measured to be ~ 80 mW, with a switching speed of < 35 ms. The switch can sustain up to 350 V at its terminals, enabling it for use in high voltage harsh environments.