Influence of machine configuration on EOS damage during wafer cleaning process

Abstract

An investigation was carried out on the charging voltage of deionized (DI) water during wafer cleaning at wafer sawing process, since it was supposed to be the root cause for EOS damages during semiconductor production. The charging voltage was measured using a non-contact electrostatic field meter. It was found that the positioning of the water filter influenced the amount of charging voltage of DI water.