Growth of high quality GaN nanowalls on Si (111) surface

S. Shetty, S. M. Shivaprasad
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引用次数: 1

Abstract

In this article, we propose the formation of GaN nanowall morphology on Si (111) surface by varying nitrogen flux from 2, 4.5 and 6sccm in PA-MBE growth. The optical, structural and electrical properties of these films are investigated. Cathodo-luminescence data suggests that the nanowall network grown at 6sccm show high optical emission and high crystalline quality. The current-voltage (I-V) characteristics of the GaN films exhibit varying rectifying behavior at 1V with forward to reverse current ratios of 39, 155, 388 for the GaN layers grown at 2, 4.5 and 6 sccm while the reverse leakage current values are 1.2×10-3, 2.6×10-4 and 9×10-6 A respectively for these junctions. The good optical and electrical properties observed suggest that GaN/Si heterojunction grown at 6sccm nitrogen flow comprise of low defect density.
在Si(111)表面生长高质量GaN纳米壁
在本文中,我们提出了在PA-MBE生长过程中,在2、4.5和6sccm不同的氮通量下,在Si(111)表面形成GaN纳米壁形态。研究了这些薄膜的光学、结构和电学性能。阴极发光数据表明,生长在6sccm的纳米壁网络具有高光发射和高晶体质量。GaN膜的电流-电压(I-V)特性在1V时表现出不同的整流行为,在2、4.5和6 sccm生长的GaN层的正向和反向电流比分别为39、155和388,而这些结的反向泄漏电流值分别为1.2×10-3、2.6×10-4和9×10-6 A。观察到的良好的光学和电学性能表明,在6sccm氮流下生长的GaN/Si异质结具有低缺陷密度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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