Development of tapeless lead-on-chip (LOC) packaging process with i-line photosensitive polyimide

M. Amagai, T. Saitoh, M. Ohsumi, E. Kawasaki, C. Yew, L. Chye, J. Toh, Swee Yang Khim
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引用次数: 0

Abstract

A double-sided adhesive tape is typically used as an insulator and mechanical buffer layer between the chip and lead frame in lead-on-chip (LOC) packages. The costs associated with the lead frame and tape process make the current LOC package more expensive than conventional packaging. A new tapeless LOC package process has been developed which significantly reduces the production costs. In this new process, the tape is replaced by a i-line photosensitive thermosetting polyimide layer coated on the passivation deposited wafer. This paper describes the optimum material properties for the polyimide, the fabrication process parameters, and the experimental and simulated reliability and performance results of the tapeless LOC package.
i线光敏聚酰亚胺无带片上铅封装工艺的发展
在片上导联(LOC)封装中,双面胶带通常用作芯片和引线框架之间的绝缘体和机械缓冲层。与引线框架和胶带工艺相关的成本使当前的LOC封装比传统封装更昂贵。开发了一种新的无胶带LOC封装工艺,大大降低了生产成本。在这种新工艺中,磁带被涂覆在钝化沉积晶片上的i线光敏热固性聚酰亚胺层所取代。本文介绍了聚酰亚胺的最佳材料性能、制备工艺参数以及无胶带LOC封装的可靠性和性能的实验和模拟结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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