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Research on femtosecond infrared laser cutting 4H-SiC wafer

Sixteenth National Conference on Laser Technology and Optoelectronics Pub Date : 2021-08-31 DOI:10.1117/12.2602464
Yanfei Shen, Yunsong Huang, Yongdu Li, Qingchu Zhao, Chen Chen, Mingliang Yao
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飞秒红外激光切割4H-SiC晶圆的研究
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Sixteenth National Conference on Laser Technology and Optoelectronics
Sixteenth National Conference on Laser Technology and Optoelectronics
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