4-Mb MOSFET-selected phase-change memory experimental chip

Abstract

This paper presents a 4-Mb phase-change memory experimental chip using an MOS transistor as a cell selector. A cascode bit-line biasing scheme allows read and write voltages to be fed to the storage element with adequate accuracy. The chip was integrated with 3-V 0.18-/spl mu/m CMOS technology and experimentally evaluated. A read access time of 45 ns was measured together with a write throughput of 5 MB/s, which represents an improved performance as compared to present NOR Flash memories. Cell current distributions on the 4-Mb array proved chip functionality and a good working window, thus demonstrating the feasibility of a stand-alone phase-change memory with standard CMOS fabrication process.