D. Epp, G. Storeck, S. Vogelgesang, M. Sivis, S. Schafer, C. Ropers
{"title":"Ultrafast miniaturized pulsed electron gun for timeresolved surface measurements","authors":"D. Epp, G. Storeck, S. Vogelgesang, M. Sivis, S. Schafer, C. Ropers","doi":"10.1109/ESTC.2018.8546393","DOIUrl":null,"url":null,"abstract":"We report the development of an ultrafast miniaturized pulsed electron gun for the implementation of timeresolved low-energy electron diffraction. This electron gun consists of a nanotip photocathode and an einzel lens for beam collimation. Assembly and electrical contacting of the gun is achieved in a multistep process involving photolithography and focused-ion-beam etching. First applications in a backscattering geometry were demonstrated with a temporal resolution of 1 ps at an electron energy of 80 eV.","PeriodicalId":198238,"journal":{"name":"2018 7th Electronic System-Integration Technology Conference (ESTC)","volume":"120 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 7th Electronic System-Integration Technology Conference (ESTC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESTC.2018.8546393","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We report the development of an ultrafast miniaturized pulsed electron gun for the implementation of timeresolved low-energy electron diffraction. This electron gun consists of a nanotip photocathode and an einzel lens for beam collimation. Assembly and electrical contacting of the gun is achieved in a multistep process involving photolithography and focused-ion-beam etching. First applications in a backscattering geometry were demonstrated with a temporal resolution of 1 ps at an electron energy of 80 eV.