D. Navarro, K. Hisamitsu, T. Yamaoka, M. Tanaka, H. Kawano, H. Ueno, M. Miura-Mattausch, H. Mattausch, S. Kumashiro, T. Yamaguchi, K. Yamashita, N. Nakayama
{"title":"Circuit-simulation model of gate-drain-capacitance changes in small-size MOSFETs due to high channel-field gradients","authors":"D. Navarro, K. Hisamitsu, T. Yamaoka, M. Tanaka, H. Kawano, H. Ueno, M. Miura-Mattausch, H. Mattausch, S. Kumashiro, T. Yamaguchi, K. Yamashita, N. Nakayama","doi":"10.1109/SISPAD.2002.1034514","DOIUrl":null,"url":null,"abstract":"The field gradient along the MOSFET channel is included in the modeling of the gate-drain capacitance (C/sub gd/) by an induced capacitance approach. The new approach has been successfully implemented in surface-potential based model HiSIM (Hiroshima-university STARC IGFET Model) and is capable of reproducing measured effects, which are particularly significant for pocket-implant technology, accurately.","PeriodicalId":249609,"journal":{"name":"International Conferencre on Simulation of Semiconductor Processes and Devices","volume":"294 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conferencre on Simulation of Semiconductor Processes and Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SISPAD.2002.1034514","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The field gradient along the MOSFET channel is included in the modeling of the gate-drain capacitance (C/sub gd/) by an induced capacitance approach. The new approach has been successfully implemented in surface-potential based model HiSIM (Hiroshima-university STARC IGFET Model) and is capable of reproducing measured effects, which are particularly significant for pocket-implant technology, accurately.