J. Lloyd, S. Adamshick, C. Durcan, Y. Kandel, I. N. Lund, B. McGowan, C. Settens, Z. Zhang
{"title":"Diffusion along triple junctions is this the pathway for narrow Cu conductor lines?","authors":"J. Lloyd, S. Adamshick, C. Durcan, Y. Kandel, I. N. Lund, B. McGowan, C. Settens, Z. Zhang","doi":"10.1109/IIRW.2012.6468943","DOIUrl":null,"url":null,"abstract":"The possibility that the major mass transport pathway in very thin small dimension metallic nanoconductors is explored theoretically. It is seen that if we consider the triple junctions of the grain boundary intersecting with the cap and/or the liner the observations can be accounted for and that the grain boundary is never an important pathway.","PeriodicalId":165120,"journal":{"name":"2012 IEEE International Integrated Reliability Workshop Final Report","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE International Integrated Reliability Workshop Final Report","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IIRW.2012.6468943","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The possibility that the major mass transport pathway in very thin small dimension metallic nanoconductors is explored theoretically. It is seen that if we consider the triple junctions of the grain boundary intersecting with the cap and/or the liner the observations can be accounted for and that the grain boundary is never an important pathway.