Cycle time metrics for R&D semiconductor wafer fabrication

Abstract

This paper presents a case study for the successful development and effective use of cycle time metrics for fabricating semiconductor wafers in a research and development (R&D) environment. The metrics include multiples of theoretical cycle time (MTCT), breakdown analysis of cycle time, and cumulative queue times of baseline processes. Each of these metrics was applied to equipment types, process recipes, and overall pilot line performance as well as to production areas such as Films, Implant, and Etch.