Laser-Diffused P Emitters for Ge TPV Cells

Abstract

In this article we present the experimental optimization of thermophotovoltaic (TPV) cells fabricated by laser-diffused phosphorous emitters on p-Ge substrates. First, simulations done by PC1D software have helped to guide in the optimization process. Next, the emitter formation has been carried out experimentally by a fast and low thermal budget process based on excimer laser annealing in the melting regime of a phosphosilicate sol-gel layer deposited by spin coating. The n/p junction created has been characterized by Secondary Ion Mass Spectrometry (SIMS) and used to fabricate a TPV cell as a proof of concept.