A Study of Flexural, Anharmonic and Thickness-Shear Modes of Vibrations in Quartz Resonators Using Scanning Electron Microscope

Abstract

Crystal resonator plates or disks are capable of vibrating in different modes. Primarily, these modes can cause extensional, flexural or shear (thickness or face) motions. In the actual practice of usins bonded resonators, due to finite dimensions and reflection from boundaries, there results a complex coupling of these different modes which gives rise to a host of frequencies that a crystal resonator is capable of vibrating at. A variety of experimental techniques have been used for mode identification and also t suppress the undesired modes of vibrations.