A high-power handling MEMS optical scanner for display applications

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607833

Y. Ohira, A. Checkovskiy, T. Yamanoi, T. Endo, H. Fujita, H. Toshiyoshi

引用次数: 7

Abstract

This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.

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用于显示应用的高功率处理MEMS光学扫描仪

本文报道了一种用于激光三维图像显示的大功率处理MEMS(微机电系统)光学扫描仪的设计与制造技术。该MEMS扫描仪通过介质膜镀膜镜面立方体和光机械结合的方式与静电MEMS扫描仪平台实现对5w (0.5 mW/脉冲)高功率yag激光束的反射控制。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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