Simulation of CMOS compatible RF MEMS varactors

Abstract

This paper proposes the design, simulation and analysis of RF MEMS varactor for VCO applications for microwave frequencies. The varactors are parallel plate capacitors using electrostatic actuation for tuning. The designed varactors have been simulated using Coventorware and optimized in terms of dimensions to suit CMOS voltages. The varactors have been analyzed for the influence of plate thickness, folded suspension flexures thickness on pull-in voltage and tuning range.