Method of extracting high-resolution digital Moiré fringe in warpage measurement

Zhong Ping, Chen-jie Song, N. Luo
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引用次数: 3

Abstract

Thermally induced stresses play a very important role in controlling the structural reliability of microchip packages. To address this issue, the shadow moiré interferometry is developed, which has been widely used in the field of observation for its real-time and high resolution. But how to extract the moiré fringes by using digital image processing method from a original Moiré fringe pattern is the key to accurate measurement of the warpage. The paper mainly concentrates on the method of effectively extracting the shadow moiré fringes from interference pattern produced by warpage of the PWB board and BGA package. Firstly, the low passing filtering and the dynamic threshold binarization proposed in this paper are applied to preprocess the moiré pattern. Then, the medial axis transformation and pruning algorithm applied to extract skeleton of moiré fringe have been put forward. Because the forficate fringes and noise fringes are main factors to affect precision of measurement, a effective main fringe extracting algorithm is proposed, which not only identifies and removes the forficate fringes and noise fringes from the main fringes, but also can connect the crack fringes which are hardly avoided after thinning operation. Finally, the information of warpage can be obtained from the location and orientation of moiré fringes. The three-dimensional delineation of detected object is resolved according to the moiré fringes extracted from shadow moiré pattern.
翘曲测量中高分辨率数字莫尔条纹提取方法
热致应力在控制微芯片封装结构可靠性方面起着非常重要的作用。为了解决这一问题,影子莫尔干涉法应运而生,以其实时性和高分辨率在观测领域得到了广泛的应用。如何利用数字图像处理方法从原始的莫尔条纹图中提取莫尔条纹是精确测量翘曲的关键。本文主要研究了从印制板和BGA封装翘曲产生的干涉图样中有效提取阴影条纹的方法。首先,采用本文提出的低通滤波和动态阈值二值化方法对图像进行预处理。然后,提出了用于提取条纹骨架的中轴变换和剪枝算法。由于复合条纹和噪声条纹是影响测量精度的主要因素,提出了一种有效的主条纹提取算法,该算法不仅能识别和去除主条纹中的复合条纹和噪声条纹,而且能将稀疏处理后难以避免的裂纹条纹连接起来。最后,根据波纹条纹的位置和方向可以获得翘曲信息。根据从阴影莫尔条纹中提取的莫尔条纹来分辨被检测目标的三维轮廓。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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