High Overtone Bulk Acoustic Resonators built using Aluminum Nitride thin films deposited onto AT-cut quartz plates

J. Masson, D. Gachon, L. Robert, N. Bazin, J. Friedt, G. Martin, S. Alzuaga, R. Rodolphe, B. Guichardaz, S. Ballandras
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引用次数: 3

Abstract

Compact high stability frequency sources devoted to on-board applications may be stabilized by acousto-electric devices such as SAW and BAW resonators. Many architectures have been proposed to improve the quality factor of such devices which directly influences the phase noise figures of the oscillator. However, the quality factor-frequency products of such acousto-electric devices mainly built on quartz hardly overcome 1013, which remains rather small compared to the intrinsic mechanical quality factor of the material. In the 80's, Lakin et al. have emphasized the capability of high overtone bulk acoustic resonator (HBAR) to present high quality factors at frequencies in the GHz range. In this paper, we characterize the resonance properties of HBAR built on thick AT-cut quartz plates excited by a C-oriented aluminum nitride thin films deposited atop quartz, examining its behaviour versus temperature and its capability to stabilize a Colpitts oscillator
使用氮化铝薄膜沉积在at切割石英板上的高泛音体声谐振器
专用于车载应用的紧凑高稳定性频率源可以通过声电装置(如SAW和BAW谐振器)来稳定。为了提高直接影响振荡器相位噪声系数的器件的质量因数,人们提出了许多结构。然而,这种主要基于石英的声电器件的质量因子-频率乘积很难克服1013,与材料的内在机械质量因子相比仍然很小。在80年代,Lakin等人强调了高泛音体声谐振器(HBAR)在GHz频率范围内呈现高质量因子的能力。在本文中,我们描述了在石英上沉积的c取向氮化铝薄膜激发的厚at切割石英板上构建的HBAR的共振特性,研究了其对温度的行为及其稳定科尔皮茨振荡器的能力
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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