LIGA and alternative techniques for microoptical components

Abstract

Microoptical components can be replicated in various thermoplastic materials, using micromolds fabricated through LIGA or alternative techniques like anisotropic etching of silicon or mechanical micromachining. The replication technique itself can be fulfilled on dedicated machines or on in-house fabricated tools. We report as demonstrators high aperture microlenses, diffraction gratings and microprisms, single or in arrays. The replication technique is well-suited for high-performance microfabrication in small size enterprises.