Membrane based actuator-integrated force arrays

1994 Proceedings. 44th Electronic Components and Technology Conference Pub Date : 1994-05-01 DOI:10.1109/ECTC.1994.367530

J. Bousaba, S. Bobbio, S. Goodwin-Johansson, M. Kellam, B. Dudley, J. Jacobson, S. Jones, T. D. DuBois, F. Tranjan

引用次数: 1

Abstract

Integrated Force Arrays (IFAs) are membrane based actuators that are made of polyimide material. They are metallized membranes that are flexible enough to undergo substantial deformation when a voltage is applied. IFAs can be patterned using the techniques of VLSI electronics. They can be integrated in arrays to form complex systems that have wide range of applications. The theory of operation and the methods of construction are presented.<>

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基于薄膜的致动器-集成力阵列

集成力阵列(IFAs)是由聚酰亚胺材料制成的基于膜的致动器。它们是金属化的膜，当施加电压时，它们具有足够的灵活性，可以承受很大的变形。ifa可以使用VLSI电子技术进行图像化。它们可以集成在阵列中，形成具有广泛应用范围的复杂系统。介绍了其工作原理和施工方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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1994 Proceedings. 44th Electronic Components and Technology Conference

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