Application of Design of Computer Experiments (DoCE) method for the extraction of the elasto-plastic behavior law of ECD copper through nano-indentation tests

Abstract

This paper report a new methodology combining finite element modeling (FEM) and nanoindentation tests in order to extract the plasticity law of ECD copper film. Thanks to this approach, we demonstrate that simple plasticity law (ANSYS Multilinear ISOtropic hardening (MISO) [1]) reaches the goal of fitting instead of more complex ones (Hollomon-like models [2]). In addition, there is no unique solution but a set of good solutions!