Technology changes in the field of sensors

Abstract

Summary form only given. The history and current status of sensor technology are reviewed. It is predicted that modern technologies such as thin- or thick-film fabrication or silicon process technology will initiate evolutional processes rather than a revolution of silicon sensors, with classical sensors and their silicon counterparts sharing future applications (the latter for mass applications: the former for special purposes where delicate specifications or environmental conditions cannot be met by the physical properties of silicon).<>