Structures and vibration analysis of film bulk acoustic wave resonators

Ji Wang, Jian-song Liu, Jianke Du, Dejin Huang
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引用次数: 1

Abstract

The wireless communication technology demands for smaller size, high frequency, high performance, low energy consumption, and low cost RF components. Current products based on dielectric or SAW resonators are not enough either due to the size or the circuit loss. Film bulk acoustic resonators (FBAR) are the latest technology offering small size and high frequency RF components to the fast growing personal wireless communication technology. We reviewed the current state-of-art of the FBAR technology and explained the working mechanism of FBAR. With two major vibration models, thickness-extension and thickness-shear, we also described the FBAR structure and principle of material selection. Furthermore, we analyzed the effect of electrodes on the vibration frequency, and explained the choice of quarter wavelength reflectors in the SMR. We want to provide essential concepts and knowledge about FBAR technology to engineers who are interested in studying it further. With enough knowledge on the vibration models and materials, the design method of FBAR and SMAR can be established with accurate analysis.
薄膜体声波谐振器的结构与振动分析
无线通信技术对射频器件的小型化、高频率、高性能、低能耗和低成本提出了更高的要求。目前基于介电谐振器或SAW谐振器的产品由于尺寸或电路损耗的原因是不够的。薄膜体声谐振器(FBAR)是为快速发展的个人无线通信技术提供小尺寸高频射频元件的最新技术。本文综述了FBAR技术的发展现状,阐述了FBAR的工作机理。采用厚度-拉伸和厚度-剪切两种主要的振动模型,描述了FBAR的结构和选材原则。此外,我们还分析了电极对振动频率的影响,并解释了SMR中四分之一波长反射器的选择。我们希望为有兴趣进一步研究FBAR技术的工程师提供有关FBAR技术的基本概念和知识。通过对振动模型和材料的充分了解,可以通过精确的分析建立FBAR和SMAR的设计方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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