Modeling a fixed-fixed beam nano biosensor using equivalent electrical circuit technique

Abstract

A fixed-fixed beam nano structure has been presented and it has been shown that it can be used as a mass sensor. Successful operation of this device in liquid can be used to make a bio-sensor useful for life sciences. In this paper an equivalent circuit for the device has been proposed with the percentage error in frequency and bandwidth response found to be 2.3% and 18.3% respectively. Similar steps can be used to develop an equivalent circuit of the device in liquid. Existing techniques for the quality factor improvement can be applied to obtain a nano scale sensor for mass detection in liquid. With further processing such a device can be used as a biosensor. Development of an equivalent circuit will enable the analysis of the device by using conventional circuit simulation softwares hence simplifying the study of the nano biosensor.