{"title":"Laser interconnections on silicon","authors":"G. Nicolas","doi":"10.1109/EEMTS.1988.75941","DOIUrl":null,"url":null,"abstract":"Laser techniques for reconfiguration (i.e. cutting or linking) of aluminum conductors on silicon wafer-scale integrated circuits are discussed.<<ETX>>","PeriodicalId":137899,"journal":{"name":"Fourth IEEE/CHMT European International Electronic Manufacturing Technology Symposium","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fourth IEEE/CHMT European International Electronic Manufacturing Technology Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EEMTS.1988.75941","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Laser techniques for reconfiguration (i.e. cutting or linking) of aluminum conductors on silicon wafer-scale integrated circuits are discussed.<>