Green, self-luminescent Tb3+ doped silicon oxy-nitride microdisk on Si chip for biosensor applications

2008 5th IEEE International Conference on Group IV Photonics Pub Date : 2008-10-07 DOI:10.1109/GROUP4.2008.4638191

Hoon Jeong, J. Shin, G. Sung

引用次数: 0

Abstract

We design and fabricate green, self-luminescent Tb-doped SiOxNy microdisks on Si chip for low-cost, all-Si biosensor applications. WGM was obtained via top-pumping and side-PL measurements, and obtained Q-factor was 220.

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绿色自发光Tb3+掺杂氮氧硅微盘在硅片上的生物传感器应用

我们在硅片上设计和制造绿色，自发光掺杂tb的SiOxNy微磁盘，用于低成本，全硅生物传感器应用。通过顶泵和侧pl测量获得WGM, q因子为220。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2008 5th IEEE International Conference on Group IV Photonics

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