Sensor fusion for ULSI manufacturing process control

Abstract

An integrated sensor system for conductive layer deposition process control is presented. The process equipment employs a multizone illuminator and noninvasive sensors for dynamic process uniformity control, real-time process and end-pointing, and process diagnosis. Various modes of sensor fusion have been implemented for improved equipment/process performance. Several noninvasive in situ sensors developed and integrated in a rapid thermal chemical-vapor-deposition (CVD) system for CVD tungsten (CVD-W) process control and diagnosis are presented.<>