Mechanism B I-V Symmetry for MIM Capacitors Used in Microelectronics

Abstract

The I-V characteristics of MIM capacitors tend to be asymmetrical. However, the I-V characteristics of MIM capacitors can sometimes be symmetrical because of two different mechanisms: Mechanism A and Mechanism B. For high-k MIM capacitors with ultrathin high-k dielectric, Mechanism B is the more likely mechanism.