Optimal design of a resonating MEMS magnetometer: A multi-physics approach

Abstract

A multi-physics model for a beam subject to current flow in a magnetic field is proposed which takes into account thermal and non-linear geometrical effects. The model is applied to the study of a Lorentz-force MEMS magnetometer. A topology optimization algorithm in which geometrical parameters of the beam subject to Lorentz force are considered optimization variables is proposed and discussed.