Comparison of thermal stress under TCT between SiC and Si power devices using direct chip-bonding with ag sintered layer on Cu plate

Masaki Kanemoto, M. Aoki, A. Mochizuki, Y. Murakami, M. Tsunoda, Goro Yoshinari, N. Nakano
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Abstract

This work clarifies the thermal stress profiles and concentrations under thermal cycling test by 3D multi-physics solver for SiC and Si power device chip systems using Ag sintering chip-attachment on Cu plate. A comparison analysis between SiC and Si showed that the maximum stress value in SiC structure is higher than that in Si structure for both Ag sintering and conventional solder chip-attachments due to larger Young's modulus of SiC. The thickness of Ag sintered layer is five times thinner than conventional solder, and this slightly increases the stress in Ag sintered layer for SiC structures with the Cu plate thickness below 3 mm. To reveal the physical mechanism of thermal stress the stress directions are also clarified. It was found that the normal stress is the major component of von Mises stress at the corners of Ag sintered layer, and both SiC and Si chips.
Cu板上银烧结层直接晶片键合SiC与Si功率器件TCT热应力比较
本文利用三维多物理场求解器,阐明了Cu板上Ag烧结芯片的SiC和Si功率器件芯片系统在热循环测试下的热应力分布和集中。SiC和Si的对比分析表明,由于SiC的杨氏模量较大,无论是在Ag烧结过程中还是在常规焊料贴片中,SiC结构中的最大应力值都高于Si结构。Ag烧结层的厚度比传统焊料薄5倍,对于Cu板厚度小于3 mm的SiC结构,Ag烧结层的应力略有增加。为了揭示热应力的物理机制,还对应力方向进行了澄清。结果表明,在Ag烧结层的边角处,SiC片和Si片的von Mises应力主要由法向应力组成。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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