Aluminum Electromigration Lifetime Variations with Linewidth: The Effects of Changing Stress Conditions

J. Arzigian
{"title":"Aluminum Electromigration Lifetime Variations with Linewidth: The Effects of Changing Stress Conditions","authors":"J. Arzigian","doi":"10.1109/IRPS.1983.361957","DOIUrl":null,"url":null,"abstract":"The electromigration behavior of aluminum in films deposited by In-Source evaporation has been examined for films with widths ranging from 2 to 5 ¿m and lengths ranging from 30-80 cm. The linewidth dependence of the lifetime was obtained for films subjected to steady direct current stressing as well as for films subjected to pulsed current stressing. The results indicate that the observed linewidth dependence is a function of the nature of the accelerated aging method employed. Those samples subjected to high frequency, (2MHz), low duty cycle pulses showed less linewidth dependence for lifetime than did those subjected to high duty cycle and steady direct current stressing. Measurements utilizing pulse nonlinearity testing show a correlation between the onset of degradation as evidenced by a change in the thermal time constant, and the nature of the applied current stress tests is proposed which may more accurately predict metallization lifetime under actual use conditions.","PeriodicalId":334813,"journal":{"name":"21st International Reliability Physics Symposium","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1983-04-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"21st International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1983.361957","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6

Abstract

The electromigration behavior of aluminum in films deposited by In-Source evaporation has been examined for films with widths ranging from 2 to 5 ¿m and lengths ranging from 30-80 cm. The linewidth dependence of the lifetime was obtained for films subjected to steady direct current stressing as well as for films subjected to pulsed current stressing. The results indicate that the observed linewidth dependence is a function of the nature of the accelerated aging method employed. Those samples subjected to high frequency, (2MHz), low duty cycle pulses showed less linewidth dependence for lifetime than did those subjected to high duty cycle and steady direct current stressing. Measurements utilizing pulse nonlinearity testing show a correlation between the onset of degradation as evidenced by a change in the thermal time constant, and the nature of the applied current stress tests is proposed which may more accurately predict metallization lifetime under actual use conditions.
铝电迁移寿命随线宽的变化:应力条件变化的影响
研究了铝在源内蒸发沉积薄膜中的电迁移行为,薄膜的宽度为2 ~ 5¿m,长度为30 ~ 80 cm。得到了薄膜在稳定直流应力和脉冲电流应力作用下的线宽与寿命的关系。结果表明,观察到的线宽依赖性是所采用的加速时效方法性质的函数。受高频(2MHz)、低占空比脉冲影响的样品与受高占空比和稳定直流应力影响的样品相比,对寿命的线宽依赖性较小。利用脉冲非线性测试的测量表明,热时间常数的变化证明了退化的开始与所应用的电流应力测试的性质之间存在相关性,这可以更准确地预测实际使用条件下的金属化寿命。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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