Microstructure of hydrogenated amorphous silicon layers studied by Spectroscopic Ellipsometry for the surface passivation in heterojunction solar cells
Wanwu Guo, Liping Zhang, Jian Bao, Fanying Meng, Yifeng Chen, E. Lee, Zhiqiang Feng, P. Verlinden, Zhengxin Liu
{"title":"Microstructure of hydrogenated amorphous silicon layers studied by Spectroscopic Ellipsometry for the surface passivation in heterojunction solar cells","authors":"Wanwu Guo, Liping Zhang, Jian Bao, Fanying Meng, Yifeng Chen, E. Lee, Zhiqiang Feng, P. Verlinden, Zhengxin Liu","doi":"10.1109/PVSC.2015.7356329","DOIUrl":null,"url":null,"abstract":"The defect scatter interval (S<sub>t</sub>) of a-Si:H/c-Si interface and void concentration (C<sub>v</sub>) of a-Si:H were analyzed by Spectroscopic Ellipsometry (S<sub>E</sub>). The passivation performance of a-Si:H layers in SHJ solar cells was not only affected by the conductivity, but more importantly, it was strongly governed by the hydrogen content (C<sub>H</sub>) in a-Si:H layers. In addition, the microstructure deduced from SE was in perfect accordance with the results revealed by TEM technique. Then, an implied open circuit voltage (V<sub>oc</sub>,i<sub>m</sub>) of 732mV was obtained when S<sub>t</sub> was about 7fs and CH around 7 at.%.","PeriodicalId":427842,"journal":{"name":"2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PVSC.2015.7356329","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The defect scatter interval (St) of a-Si:H/c-Si interface and void concentration (Cv) of a-Si:H were analyzed by Spectroscopic Ellipsometry (SE). The passivation performance of a-Si:H layers in SHJ solar cells was not only affected by the conductivity, but more importantly, it was strongly governed by the hydrogen content (CH) in a-Si:H layers. In addition, the microstructure deduced from SE was in perfect accordance with the results revealed by TEM technique. Then, an implied open circuit voltage (Voc,im) of 732mV was obtained when St was about 7fs and CH around 7 at.%.