Quartz and GaPO4 pressure transducers for high resolution applications in high temperature: A simulation approach

Leonardo B. M. Silva, Edval J. P. Santos
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引用次数: 2

Abstract

An accurate computer model was created for the extraction of the quality factor, Q, and the sensitivity of piezoelectric pressure transducer. The quality factor is a key parameter to determine the transducer resolution. The effect of viscosity loss and geometrical factors, such as: thickness, diameter, and concavity (plano-convex and bi-convex) are simulated in AT-cut quartz and Hi-Q cut gallium phosphate (GaPO4) materials. AT-cut quartz is a standard material in this type of application, and gallium phosphate is a promising material for advanced pressure transducer. The goal is to evaluate device specifications to achieve the highest Q-factor (Q > 106) at frequencies up to 10 MHz. Temperature dependent elastic constants and boundary load conditions are used to simulate temperature and hydrostatic pressure effects on the vibrating transducer. The frequency shift is simulated in the range of 25 °C to 200 °C and 14.7 psi to 20,000 psi for temperature and pressure, respectively. The simulation results allows for a resolution of 1 psi for a frequency resolution of 1 ppm. All simulations are carried out with COMSOL Multiphysics software, version 4.4.
用于高温高分辨率应用的石英和GaPO4压力传感器:模拟方法
建立了准确的计算机模型,用于提取压电式压力传感器的质量因子Q和灵敏度。质量因子是决定传感器分辨率的关键参数。模拟了at切割石英和Hi-Q切割磷酸镓(GaPO4)材料中粘度损失和几何因素(如厚度、直径和凹凸度(平凸和双凸))的影响。at切割石英是这类应用的标准材料,而磷酸镓是一种有前途的先进压力传感器材料。目标是评估器件规格,以在高达10 MHz的频率下实现最高的Q因子(Q > 106)。采用温度相关的弹性常数和边界载荷条件,模拟了温度和静水压力对振动换能器的影响。频率漂移的模拟范围分别为25°C至200°C和14.7 psi至20,000 psi的温度和压力。模拟结果允许1 psi的分辨率为1 ppm的频率分辨率。所有的模拟都是在COMSOL Multiphysics软件4.4版中进行的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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