Yanfeng Wang, Marco A. Cabassi, T. Ho, K. Lew, J. Redwing, T. Mayer
{"title":"Electrical properties of p- and n-type silicon nanowires","authors":"Yanfeng Wang, Marco A. Cabassi, T. Ho, K. Lew, J. Redwing, T. Mayer","doi":"10.1109/DRC.2004.1367764","DOIUrl":null,"url":null,"abstract":"There has been considerable interest in bottom-up integration of semiconductor nanowires for their application in future logic, memory, and sensor circuits. The ability to integrate field effect devices with p- and n-type conduction channels is a challenge that must be overcome to fabricate complementary logic circuits using such technologies. In this talk, we present the results of four-point resistivity and gate-dependent conductance measurements taken on unintentionally-doped, p-type, and n-type silicon nanowires (SiNWs). These results emphasize that future efforts must address the source of the high p-type background doping concentration in vapor-liquid-solid grown SiNWs to facilitate improvements in the properties of n-channel devices.","PeriodicalId":385948,"journal":{"name":"Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.","volume":"181 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2004.1367764","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
There has been considerable interest in bottom-up integration of semiconductor nanowires for their application in future logic, memory, and sensor circuits. The ability to integrate field effect devices with p- and n-type conduction channels is a challenge that must be overcome to fabricate complementary logic circuits using such technologies. In this talk, we present the results of four-point resistivity and gate-dependent conductance measurements taken on unintentionally-doped, p-type, and n-type silicon nanowires (SiNWs). These results emphasize that future efforts must address the source of the high p-type background doping concentration in vapor-liquid-solid grown SiNWs to facilitate improvements in the properties of n-channel devices.