Effect of nitrogen atoms included in CNx coatings on friction sliding against Si3N4 ball in nitrogen gas

T. Tokoroyama, N. Umehara
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引用次数: 3

Abstract

Carbon nitride (CNx) coatings are thought to have good tribological properties because of low friction and high wear resistance. This material shows a friction coefficient lower than 0.01 when slid against a Si3N4 ball in dry N2 gas. The mechanism of superlow friction was believed to be due to the change in the topmost layer of the CNx surface in the wear track to a low-shear-strength layer by forming a graphite-like structure. However, the effects of nitrogen atoms in the CNx coating and the ambient N2 gas on the transformation of the surface layers of CNx remain unclear. In this work, we investigated the relationship between the friction coefficient and the nitrogen concentration in the wear track on the CNx coating. We measured the intensity of C KLL and N KLL on the wear track of CNx by Auger electron spectroscopy (AES), and conducted Raman analysis. We compared the N KLL/C KLL ratios of wear tracks from sliding in ambient N2, Ar, and O2. Only in the case of the wear track from material slid in N2, did the N KLL/C KLL ratio decrease to almost zero and the friction coefficient became lower than 0.01. On the other hand, in the Ar environment, the N KLL/C KLL ratio in the wear track was comparable to the as-deposited CNx coating, the friction coefficient became 0.03, and the IG position of Raman shift increased at most 3 cm-1. The N KLL/C KLL intensity of the wear track after friction tests in Ar and then in N2 was approximately 0.2 times as low as the as-deposited CNx. The friction coefficient in N2 gas was 0.03 when incorporated nitrogen remained in the CNx surface. On the other hand, the friction coefficient was lower than 0.03 when incorporated nitrogen was desorbed.
CNx涂层中含氮原子对氮化硅球在氮气中摩擦滑动的影响
氮化碳(CNx)涂层由于具有低摩擦和高耐磨性而被认为具有良好的摩擦学性能。在干燥的N2气体中,该材料与氮化硅球的摩擦系数小于0.01。超低摩擦的机理认为是由于磨损轨迹中CNx表面的最上层通过形成石墨状结构而转变为低剪切强度层。然而,CNx涂层中的氮原子和周围的N2气体对CNx表层转变的影响尚不清楚。本文研究了CNx涂层磨损轨迹中氮浓度与摩擦系数的关系。利用俄歇电子能谱(AES)测定了CNx磨损轨迹上的C - KLL和N - KLL的强度,并进行了拉曼分析。我们比较了N2、Ar和O2环境中滑动磨损轨迹的N - KLL/C - KLL比率。只有当材料在N2中滑动产生磨损轨迹时,N - KLL/C - KLL比才趋于零,摩擦系数小于0.01。另一方面,在Ar环境下,磨损轨迹中的N - KLL/C - KLL比与沉积态CNx涂层相当,摩擦系数变为0.03,拉曼位移的IG位置最多增加了3 cm-1。先在Ar中摩擦,再在N2中摩擦,磨损轨迹的N - KLL/C - KLL强度约为沉积态CNx的0.2倍。当氮气残留在CNx表面时,其在N2气体中的摩擦系数为0.03。脱附氮气时,摩擦系数小于0.03。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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