A comparison of copper and gold wire bonding on integrated circuit devices

L. Khoury, David J. Burkhard, D. Galloway, T. Scharr
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引用次数: 106

Abstract

A comparative approach was used to develop new copper wire bond technology using the current standard production gold wire process as a baseline. Characterizations were made in the areas of assembly processes and material selection, electrical and thermal performance, intermetallic formation on Al and Al alloy bond pads, and reliability testing. It was demonstrated that copper wire bond strength tested with wire-pull and ball-shear methods can be maintained at higher levels than comparable gold wire bonds. Die shear strengths were degraded by temperature cycling, but not by high-temperature storage. AC/DC parameter characterizations across temperature and power supply exhibited identical performances on copper and gold devices. Input impedance, capacitance, and ESD (electrostatic discharge) showed no deviations between Au and Cu wire bonded devices selected for this investigation. The lower resistivity of Cu wire offers the potential for increased device power ratings. The thermal transient response showed negligible differences between Au and Cu wire bonded devices. The difference in intermetallic growth rates between Au and Cu wire processed devices suggest that Cu wire bonded devices will have greater reliability than Au wire bonded devices. The reliability data indicate that copper wire bonding is at least equal to conventional gold wire bonding. It is concluded that a copper ball bond assembly process can be developed for mass production which will equal and potentially surpass the performance and reliability of the present gold ball bond assembly process.<>
集成电路器件上铜线和金线键合的比较
采用比较的方法,以目前的标准生产金线工艺为基准,开发了新的铜线键合技术。在装配工艺和材料选择、电学和热学性能、铝和铝合金焊盘上的金属间形成以及可靠性测试等方面进行了表征。结果表明,采用拉丝法和球剪法测试的铜丝粘结强度可以保持在比同类金丝粘结更高的水平。温度循环会降低模具的抗剪强度,但高温储存不会。在铜和金器件上,跨温度和电源的AC/DC参数表征显示出相同的性能。输入阻抗、电容和ESD(静电放电)显示,本研究选择的Au和Cu线键合器件之间没有偏差。铜线的低电阻率提供了增加器件额定功率的潜力。热瞬态响应在Au和Cu线键合器件之间的差异可以忽略不计。金属间生长速率在Au和Cu线加工器件之间的差异表明,Cu线结合器件将比Au线结合器件具有更高的可靠性。可靠性数据表明,铜线焊接至少等于常规金线焊接。结果表明,铜球键合组装工艺可用于批量生产,其性能和可靠性将与现有的金球键合组装工艺相当,甚至有可能超过这种工艺。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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CiteScore
3.10
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