Alternative tip- and laser- based nanofabrication up to 100 mm on flat and non-flat surfaces with subnanometre precision

E. Manske
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Abstract

More and more new AFM tip-based or laser structuring methods have been attracting attention as alternative lithography approaches for some years now. But most of them have only been demonstrated in the micrometer range so far, and measurement and positioning technology is usually inadequate. Instruments that can measure and structure on flat and even non-flat surfaces in growing fields of application at the atomic level are the focus of the latest developments in consistent continuation of the nanopositioning and nanomeasuring machines created at the Technical University of Ilmenau. The new developed Nano Fabrication Machine 100 (NFM-100) serves as an important experimental platform for basic research in the field of scale-spanning AFM tip-based and laser-based nanofabrication for subnanometer structuring on 4 inch surfaces. The laser interferometer based high precision machine has 20 picometer resolution and subnanometer reproducibility. It can be equipped with AFM heads as well as with laser systems that can both write and read, i.e. measure with nanometer reproducibility and accuracy. This paper describes the extraordinary capabilities of the NFM-100 and selected nanofabrication technologies, e.g. advanced scanning proximal probe lithography based on Fowler-Nordheim electron field emission, direct laser writing, and UV nanoimprint lithography.
可选择的尖端和激光为基础的纳米加工高达100毫米的平面和非平面与亚纳米精度
近年来,越来越多的基于原子力显微镜针尖或激光结构的新方法作为光刻技术的替代方法引起了人们的关注。但到目前为止,它们大多只在微米范围内进行了演示,测量和定位技术通常不足。在伊尔梅瑙技术大学创造的纳米定位和纳米测量机器的持续发展中,在原子水平上不断发展的应用领域中,可以在平坦甚至非平坦表面上测量和结构的仪器是最新发展的焦点。新开发的纳米加工机器100 (NFM-100)是一个重要的实验平台,用于4英寸表面亚纳米结构的基于AFM尖端和激光的跨尺度纳米加工领域的基础研究。基于激光干涉仪的高精度机床具有20皮米的分辨率和亚纳米级的再现性。它可以配备AFM头以及激光系统,可以写入和读取,即以纳米的再现性和精度进行测量。本文介绍了NFM-100的非凡能力和选择的纳米制造技术,例如基于Fowler-Nordheim电子场发射的先进扫描近端探针光刻,直接激光书写和UV纳米压印光刻。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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