Influence of process atmosphere circulation on the distribution of nitriding conditions in unconventional active screen plasma nitriding (ASPN) systems

G. Grzesiak, J. Walkowicz, K. Szafirowicz, D. Jakrzewski
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Abstract

The aim of this work is to verify the possibility of designing an active screen plasma nitriding (ASPN) process with a controlled gas flow direction in order to implement multifunctional hybrid devices. The specimens have been subjected to nitriding processes under the established process conditions in which two different gas flow directions have been used. In the first configuration, the gas has been supplied at the top part of the chamber and pumped out from the bottom part of the chamber. In the second configuration, the gas has been supplied at the bottom part of the chamber and evacuated from its top part. The distribution of hardness and thick-ness of the nitrided layers has been evaluated on the prepared metallographic cross-sections. The results of material tests have been compared with the results of simulation tests showing the circulation of the atmosphere inside the process chamber. The presented research results show that using both gas flow directions and the unconventional shape of the process chamber it is possible to carry out efficient nitriding processes. However, further research is necessary to obtain a homogenous layer in the entire chamber space.
工艺气氛循环对非常规主动筛等离子体渗氮(ASPN)系统渗氮条件分布的影响
本工作的目的是验证设计一个可控气流方向的有源屏等离子体氮化(ASPN)工艺以实现多功能混合器件的可能性。在两种不同的气体流动方向的既定工艺条件下,对试样进行了渗氮处理。在第一种结构中,气体在腔室的顶部供应,并从腔室的底部抽出。在第二种结构中,气体在腔室的底部供应,并从其顶部排出。在制备的金相截面上对渗氮层的硬度和厚度分布进行了评价。材料试验的结果与模拟试验的结果进行了比较,模拟试验显示了工艺室内的大气循环。研究结果表明,利用气流方向和工艺室的非常规形状都可以进行高效的氮化工艺。然而,为了在整个腔室空间中获得均匀的层,还需要进一步的研究。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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