A three-dimensional model for a graphene guided SH-SAW sensor using finite element method

Abstract

This work presents several aspects regarding the three-dimensional modeling of a guided Shear Horizontal Surface Acoustic Wave (SH-SAW) sensor. A major problem that often arises in a simulation of the acoustic wave devices is the out-of-plane displacements of the widely used Euler angles. Our approach is based on the plane wave solution where the properties of the acoustic wave vary in three dimensions and therefore are distinguished by their propagation direction, such as transverse longitudinal, transverse horizontal and transverse vertical, respectively. In this study, a new approach is developed to accurately demonstrate a Love wave platform performed with a Finite Element Method (FEM) simulation using Comsol Multiphysics®. The plane wave solution, therefore, allows the visualization of the simulation results by using data treatment such as Fast Fourier Transform (FFT). The results show reasonable agreement between the simulated and the fabricated structure. Indeed, we present that the addition of the graphene oxide sensing layer enhances the acoustic wave propagation and reduces the acoustic wave reflections efficiently. Finally, the configurations of the 3D model are compared with theoretical and experimental frequency data and the results showed very good agreement.