Charging Damage and Product Impact in a Bulk CMOS Technology

Abstract

In this paper, we tabulate the characteristics of antennas in several real designs in a 180-nm technology, and show data indicating that the product is not as susceptible to charging damage as the test structures used to control the process line. The experiment consisted of evaluating a large (500 pieces) sample of parts with considerable process-induced antenna damage - and yet no measurable degradation in product performance, yield, or reliability was found