Nanostructured VO2 film coatings for tunable MEMS resonators

Abstract

This paper reports measurements of the electrical resistance and resonant frequency of VO2-coated silicon dioxide (SiO2) bridges when the coating's insulator-to-metal transition (IMT) is thermally induced by conduction. The measurements of these two properties were done simultaneously. The decrease in electrical resistance was close to three orders in magnitude. The resonant frequency shift across the IMT started with an increase of 1.5% for temperatures in the “cold end” of the IMT, followed by a decrease of 20% for temperatures in the “hot end” of the IMT.