In-Situ Temperature Calibration  Capability for Dimensional Metrology

P. Rachakonda
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Abstract

The Dimensional Metrology Group (DMG) at the National Institute of Standards and Technology (NIST) has the capability to perform large range dimensional measurements in a facility called the Tape Tunnel. The Tape Tunnel is equipped with a 60 m long steel bench and a reference interferometer. Various artifacts and instruments, such as tape measures, optical cables, laser trackers, laser distance meters etc. are calibrated against the reference interferometer. The relative uncertainty (Uk=2) in the displacement measurement is 2.4×10-7. A major component of this uncertainty is the uncertainty in measuring the temperature in the Tape Tunnel. There are 14 temperature probes installed along the length of the steel bench; two each at seven equidistant locations. One probe measures the air temperature and the other measures the material temperature (of the steel bench). Historically, calibrating these probes involved removing all the 14 probes and sending them to the NIST Thermodynamic Metrology Group. This process introduced a considerable amount of downtime to the DMG’s measurement capabilities. This also introduced uncertainties due to a) variation in the contact geometry of the material probe with the steel bench during reinstallation, and b) variation in the resistances of the probes’ cables due to pinching and/or elongation. In an attempt to address these issues, a new in-situ temperature calibration system was developed. This paper discusses the system components, an in-situ calibration procedure, the uncertainty sources involved in the calibration process, presents an uncertainty budget, and examines it with a Monte Carlo simulation. This system enables the DMG to perform quicker in-situ temperature calibration, at frequent intervals, with minimal downtime and provides better uncertainties in the dimensional measurements.
尺寸计量的现场温度校准能力
美国国家标准与技术研究所(NIST)的尺寸计量组(DMG)有能力在一个称为磁带隧道的设施中进行大范围的尺寸测量。带式隧道配备了60米长的钢架和参考干涉仪。各种工件和仪器,如卷尺,光缆,激光跟踪仪,激光测距仪等都是根据参考干涉仪进行校准的。位移测量中的相对不确定度(Uk=2)为2.4×10-7。这种不确定度的一个主要组成部分是测量磁带隧道温度的不确定度。沿钢架长度安装有14个温度探头;7个等距位置各2个。一个探头测量空气温度,另一个测量材料温度(钢工作台)。过去,校准这些探针需要移除所有14个探针并将其发送到NIST热力学计量组。这个过程给DMG的测量能力带来了相当多的停机时间。这也引入了不确定性,由于a)在重新安装期间,材料探头与钢工作台的接触几何形状的变化,以及b)由于夹紧和/或伸长导致探头电缆电阻的变化。为了解决这些问题,开发了一种新的原位温度校准系统。本文讨论了系统的组成、原位校准程序、校准过程中涉及的不确定度来源,提出了不确定度预算,并用蒙特卡罗模拟对其进行了检验。该系统使DMG能够以更频繁的间隔进行更快的原位温度校准,停机时间最短,并在尺寸测量中提供更好的不确定性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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